Electromagnetic Reciprocating Fluid Device

ABSTRACT

It is an object of the present invention, in an electromagnetic reciprocating fluid device in which a movable member is equipped with permanent magnets, to resist a torque rotating the movable member about an axis thereof in the reciprocating direction. The electromagnetic reciprocating fluid device has a pair of electromagnets  28, 28 ′ facing each other, and permanent magnets 26, 26′ disposed in a space between the opposed electromagnets and held by a movable member  27.  When an alternating current is applied to coils  34  formed in the electromagnets, a magnetic force is generated between the electromagnets and the permanent magnets, whereby a driving force for reciprocation is applied to the movable member. One end of the movable member is connected to a piston  18  of a first piston-cylinder assembly  12,  while the other end is connected to a piston  18 ′ of a second piston-cylinder assembly  12 ′. The first and second piston-cylinder assemblies are arranged such that an axis line  58  of the first piston-cylinder assembly and an axis line  59  of the second piston-cylinder assembly are non-coaxial and vertically offset from an axis  60  of the movable member.

TECHNICAL FIELD:

The present invention relates to an electromagnetic reciprocating fluiddevice, such as a pump and a compressor, which reciprocates a piston bygenerating an alternating magnetic field by means of electromagnets.

BACKGROUND ART

Such electromagnetic reciprocating fluid devices are generally dividedto two types. In the first type, a magnetically attractable portion madeof a magnetic material is disposed on a movable member (a piston rod)connected to a piston and the movable member is reciprocated byelectromagnetic attraction force periodically generated byelectromagnets to act on the magnetically attractable portion and springforce biasing the movable member in a direction opposite to thedirection in which the magnetically attractable portion is attracted bythe electromagnetic attraction force. In the second type, the movablemember is equipped with a permanent magnet, and the permanent magnet isattracted and repelled by an alternating magnetic field generated by theelectromagnets, whereby the movable member is reciprocated.

The movable member is disposed, with a slight clearance, betweenelectromagnets oppositely arranged on both sides across thereciprocating path. The slight clearance needs to be maintained.Therefore, in the first type described above, for example, both ends ofthe movable member are slidably held to maintain the clearance (PatentDocument 1).

In the second type described above, the movable member has a permanentmagnet. Therefore, in addition to attracting force and repelling forcein the reciprocating direction, a transverse force with respect to thereciprocating direction acts on the movable member. Thus, a torque aboutthe longitudinal axis of the movable member might be generated.Generally, the permanent magnet attached to the movable member has asquare cross section. Therefore, if the permanent magnet is inclinedabout the longitudinal axis by a torque, an attracting force by oneelectromagnet becomes larger than that by the other electromagnet, whichmight cause friction of the permanent magnet against the oneelectromagnet. In general, each end of the movable member is designed dto be held by means of a piston having a circular cross section and acylinder slidably encasing the piston. Therefore, the inclination of themovable member about the longitudinal axis cannot be prevented. In orderto avoid this inclination, a device in which each end of the movablemember is supported by a diaphragm or a cross-shaped support springhaving flexibility in the reciprocating direction and stiffness aboutthe axis is disclosed (Patent Document 2). However, such support membersrestrict the motion of the movable member in the longitudinal direction,which is not preferable for a fluid device.

Patent Document 1: Japanese Examined Patent Application Publication No.57-30984

Patent Document 2: Japanese Unexamined Patent Application PublicationNo. 2002-213354

DISCLOSURE OF THE INVENTION Problems to be Solved by the Invention

In view of the foregoing, it is an object of the present invention toprovide an electromagnetic reciprocating fluid device in which themotion of the movable member in the longitudinal direction is notexcessively restrained and the inclination of the movable member aboutthe longitudinal axis is prevented.

Means for Solving the Problems

The present invention provides an electromagnetic reciprocating fluiddevice including a movable member reciprocatable along a predeterminedaxis, an electromagnetic drive unit for driving the movable member alongthe predetermined axis by generating a magnetic field acting on themovable member, and a support unit for slidably supporting both ends ofthe movable member. The electromagnetic reciprocating fluid devicegenerates a fluid flow by reciprocating the movable member. The supportunit slidably supports the movable member so as to resist torque imposedon the movable member about the axis.

Since the movable member is supported at the both ends thereof so as toresist a torque which may be imposed on the movable member, theabove-described problems in the conventional technique will be solved.

Specifically, the support unit includes a first support unit forsupporting one end of the movable member and a second support unit forsupporting the other end. The first support unit has a first pistonsecured to the one end of the movable member and a first cylinderencasing the first piston, and the first piston is slidable along thelongitudinal axis of the first cylinder which is parallel to or coaxialwith the above-mentioned predetermined axis. The second support unit hasa second piston secured to the other end of the movable member and asecond cylinder encasing the second piston, and the second piston isslidable along the longitudinal axis of the second cylinder which isparallel to and apart a predetermined distance from the longitudinalaxis of the first cylinder.

With this configuration, the first and second pistons are slidable alongthe respective axes parallel to and spaced from each other. Therefore,even if a torque is imposed on the movable member, the first and secondpistons are prevented from rotating about the respective axes. Thus, theinclination of the movable member can also be prevented.

As another example, the longitudinal axes of the first cylinder and thesecond cylinder are aligned with the predetermined axis, and at leasteither the first cylinder and the first piston encased in the firstcylinder or the second cylinder and the second piston encased in thesecond cylinder have a noncircular cross section. Thus, even if a torqueabout the predetermined axis is imposed on the movable member, it ispossible to prevent the at least one piston from rotating about thelongitudinal axis of the cylinder encasing the piston.

The present invention also provides an electromagnetic reciprocatingfluid device including a movable member having a permanent magnet andreciprocatable along a predetermined axis, an electromagnetic drive unitfor driving the movable member along the predetermined axis bygenerating an alternating magnetic field acting on the permanent magnet,and a support unit for slidably supporting both ends of the movablemember. The electromagnetic reciprocating fluid device generates a fluidflow by reciprocating the movable member. The permanent magnet has acylindrical shape extending in the reciprocating direction of themovable member, and both sides of the permanent magnet with respect to aplane including the axis of the permanent magnet have opposite magneticpolarities.

In this device, since the permanent magnet has a circular cross section,even if the permanent magnet is rotated about the axis thereof, theclearance between the permanent magnet and the electromagnet does notchange. Thus, it is possible to prevent the friction of the permanentmagnet against the electromagnet.

Furthermore, the present invention provides an electromagneticreciprocating fluid device in which:

the electromagnetic drive unit has first and second electromagnetsdisposed on both sides of the movable member;

the electromagnet each have a central magnetic pole, and first andsecond side magnetic poles disposed on both sides of the centralmagnetic pole in the reciprocating direction of the movable member so asto be spaced a predetermined distance from the central magnetic pole;

the central magnetic pole and the first and second side magnetic polesof each of the first and second electromagnets are alternatelymagnetized with opposite polarities so that the central magnetic polehas a magnetic polarity opposite to that of the first and second sidemagnetic poles and that the central magnetic poles and the first andsecond side magnetic poles of the first electromagnet have magneticpolarities opposite to those of the second electromagnet, respectively;

the permanent magnet includes a first permanent magnet and a secondpermanent magnet spaced a predetermined distance from each other in thereciprocating direction of the movable member such that the firstpermanent magnet is magnetically attracted and repelled according to therelationship between the first side magnetic poles and the centralmagnetic poles and the second permanent magnet is magnetically attractedand repelled according to the relationship between the central magneticpoles and the second side magnetic poles; and,

both sides of the first permanent magnet have opposite magneticpolarities with respect to a first plane including the axis of the firstpermanent magnet and inclined at a predetermined angle with respect to aplane vertical to a flux path generated between the first side magneticpoles of the first and second electromagnets, while both sides of thesecond permanent magnet have opposite magnetic polarities with respectto a second plane including the axis of the second permanent magnet andinclined oppositely to the first plane at a predetermined angle withrespect to a plane vertical to a flux path generated between the secondside magnetic poles of the first and second electromagnets.

In this device, the first and second planes of the respective first andsecond cylindrical permanent magnets on which the polarity is reversedare inclined oppositely to each other. Therefore, it is possible tocancel torques about the axis which are imposed on the movable memberwhich are caused by attracting or repelling electromagnetic forcesgenerated by interaction of the permanent magnets and theelectromagnets.

Specifically, the electromagnetic reciprocating fluid device may has apair of spring members disposed at both ends of the movable member andapplying a biasing force toward the center of the movable member in theaxial direction.

In a case where the permanent magnet remains attracted to the sidemagnetic poles when an electromagnetic force is not applied to thepermanent magnet, the spring members are strained. Therefore, when anelectromagnetic force is applied in this state, a biasing force of thestrained spring members can help the movable member start to move.

Further, with this configuration, it is possible to freely determine thenatural frequency of the movable part including the movable member andthe pistons, which is determined by the mass of the movable part and thespring constant of the spring member. This is useful for reciprocationcontrol.

Effects of the Invention

In the electromagnetic reciprocating fluid device according to thepresent invention, as described above, it is possible to support themovable part including the permanent magnets, the magnet holding member,and the pistons, against a biasing force in the reciprocating directionand a torque about the reciprocating axis acting on the movable part, orto prevent the generation of a torque.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view taken along line I-I of FIG. 2, showinga first embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along line II-II of FIG. 1.

FIG. 3 is a cross-sectional view taken along line III-III of FIG. 1.

FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 5,showing a second embodiment of the present invention.

FIG. 5 is a cross-sectional view taken along line V-V of FIG. 4.

FIG. 6 is a cross-sectional view taken along line VI-VI of FIG. 4.

FIG. 7 is a cross-sectional view taken along line VII-VII of FIG. 4.

FIG. 8 is a cross-sectional view taken along line VIII-VIII of FIG. 10,showing a third embodiment of the present invention.

FIG. 9 is a cross-sectional view taken along line IX-IX of FIG. 8.

FIG. 10 is a cross-sectional view taken along line X-X of FIG. 8.

FIG. 11 is a cross-sectional view taken along line XI-XI of FIG. 12,showing a fourth embodiment of the present invention.

FIG. 12 is a cross-sectional view taken along line XII-XII of FIG. 11.

EXPLANATION OF REFERENCE SYMBOLS:

-   10 electromagnetic reciprocating fluid device-   12, 12′ first and second piston-cylinder assemblies-   14 drive part-   16, 16′ cylinders-   18, 18′ pistons-   20 central housing-   21 inlet-   22, 22′ check valves-   24, 24′ outlets-   26, 26′ permanent magnets-   27 movable member-   28, 28′ electromagnets (electromagnetic drive units)-   30 E-shaped core-   30 a central magnetic poll-   30 b, 30 c side magnetic poles-   32 coil form-   34 coil-   58, 59 axis lines-   60 axis-   62 compression coil spring-   110 electromagnetic reciprocating fluid device-   112 movable part-   130, 132 fixed electromagnets-   134, 136 E-shaped cores-   134 a, 136 a central magnetic poles-   134 b, 136 b magnetic poles-   142, 144 coils-   150, 152 virtual planes-   154 fixing screw hole-   156 fixing screw-   210 electromagnetic reciprocating fluid device-   212 guide member-   310 electromagnetic reciprocating fluid device-   312, 314 extending portions-   316 body housing-   318, 322 guide grooves-   320 lid member

BEST MODE FOR CARRYING OUT THE INVENTION

An embodiment of the present invention will now be described withreference to the accompanying drawings.

FIGS. 1 to 3 show a first embodiment of an electromagnetic reciprocatingfluid device 10 according to the present invention. FIG. 1 is across-sectional view taken along line I-I of FIG. 2; FIG. 2 is across-sectional view taken along line II-II of FIG. 1; and FIG. 3 is across-sectional view taken along line III-III of FIG. 1.

As shown in FIGS. 1 and 2, the electromagnetic reciprocating fluiddevice 10 has first and second piston-cylinder assemblies 12, 12′disposed on both left and right sides thereof, and a drive part 14disposed at the center thereof.

The first and second piston-cylinder assemblies 12, 12′ have cylinders16, 16′, and pistons 18, 18′, respectively. The pistons are reciprocatedin the right and left directions (as viewed in FIGS. 1 and 3) in therespective cylinders, thereby sucking a fluid such as air from an inlet21 formed in a central housing 20 and discharging the fluid throughcheck valves 22, 22′ from respective outlets 24, 24′ formed at the leftand right ends of the fluid device 10, as shown by arrows in FIG. 1.

As shown in FIG. 1, the left and right cylinders 12, 12′ are arrangedsuch that longitudinal axis lines thereof extending in theright-and-left direction are offset by a distance a in oppositedirections.

As shown in FIGS. 2 and 3, the pistons 18, 18′ are connected by means ofa movable member 27 that is generally in the shape of a plate and has apair of permanent magnets 26, 26′. The permanent magnets 26, 26′ areeach magnetized with opposite polarities of the N-pole and S-pole on theleft and right sides as viewed in FIG. 2 such that the left-sidepermanent magnet 26 and the right-side permanent magnet 26′ aremagnetized oppositely to each other. In other words, when viewed fromthe front side of FIG. 1 the permanent magnet 26 is magnetized to theN-pole and the permanent magnet 26′ is magnetized to the S-pole. On theother hand, when viewed from the back side of FIG. 1, the permanentmagnet 26 is magnetized to the S-pole and the permanent magnet 26′ ismagnetized to the N-pole.

As shown in FIGS. 2 and 3, a drive part 14 at the center of the devicehas a pair of electromagnets 28, 28′ disposed on both sides of themovable member 27. Each electromagnet has an E-shaped core 30, and acoil 34 wound around a coil form 32 formed around a central magneticpole 30 a of the E-shaped core. The central magnetic poles, left-sidemagnetic poles 30 b, and right-side magnetic poles 30 c of the bothelectromagnets are oppositely arranged across the movable member 27 withslight clearances between the poles and the movable member.

By applying an electric current to the electromagnets 28, 28′, forexample, the central magnetic pole of the electromagnet 28 is magnetizedto the S-pole and the left-side and right-side magnetic poles aremagnetized to the N-poles, while the central magnetic pole of theelectromagnet 28′ facing the electromagnet 28 is magnetized to theN-pole and the left-side and right-side magnetic poles are magnetized tothe S-poles. In this case, the permanent magnet 26 is repelled by thecentral magnetic poles and attracted by the left-side magnetic poles,while the permanent magnet 26′ is attracted by the central magneticpoles and repelled by the right-side magnetic poles. Thus, the permanentmagnets are subject to a force moving the permanent magnets togetherwith the movable member 27 in the leftward direction indicated by anarrow M in FIG. 1. Therefore, by applying an alternating current tothese electromagnets, the central magnetic poles and the left-side andright-side magnetic poles are alternately magnetized to differentmagnetic poles. Thus, the permanent magnets of the magnet holding memberis driven in the right and left directions, whereby the pistons 18, 18′slide in the respective cylinders, generating a fluid flow indicated byarrows in FIG. 1.

In a case where surfaces of the permanent magnets 26, 26′ facingmagnetic pole surfaces of the cores 30 are flat as in this embodiment,the movable member 27 is subject to a torque rotating the movable memberin either of directions as indicated by an arrow R in FIG. 2, exceptwhen attracting forces between the pair of electromagnets 28, 28′ andthe permanent magnets 26, 26′ are balanced at a neutral position.Therefore, if a resisting force against this torque is not applied, thepermanent magnets 26, 26′ or the movable member 27 might contact withthe electromagnets 28, 28′ or other fixed members. In this embodiment,as described above, the axis lines 58, 59 of the first and secondpiston-cylinder assemblies 12, 12′ are non-coaxial, and are verticallyoffset by a distance a from an axis 60 of the movable member 27.Therefore, it is possible to resist the torque, thereby preventing therotation of the movable member.

In the illustrated embodiment, a compression coil spring 62 is disposedin each piston-cylinder assembly. This compression coil spring applies abiasing force toward the center of the movable part composed of thepermanent magnets 26, 26′, the movable member 27, and the pistons 18,18′, in the axial direction (right-and-left direction in FIG. 1). Forexample, in a case where the permanent magnet remains attracted toeither of the left-side and right-side magnetic poles when an electriccurrent is not applied to the electromagnets 28, 28′ and anelectromagnetic force is not applied to the permanent magnet, thesprings are strained. Therefore, when an electromagnetic force isapplied in this state, biasing forces of the springs can help themovable member start to move. Further, the natural frequency of themovable part, which is determined by the mass of the movable part andthe springs constant of the compression coil springs 62, can be freelydetermined by determining the spring constant.

FIGS. 4 to 7 show a second embodiment of the electromagneticreciprocating fluid device 110 according to the present invention. FIG.4 is a cross-sectional view taken along line IV-IV of FIG. 5; FIG. 5 isa cross-sectional view taken along line V-V of FIG. 4; FIG. 6 is across-sectional view taken along line VI-VI of FIG. 4; and FIG. 7 is across-sectional view taken along line VII-VII of FIG. 4. Theconfiguration of this electromagnetic reciprocating fluid device 110 isgenerally the same as that of the above-described first embodiment.Therefore, the same elements as those in the first embodiment aredenoted by the same reference numerals. This electromagneticreciprocating fluid device 110 is characterized in that permanentmagnets 26, 26′, which are plate-shaped in the above-described firstembodiment, have a cylindrical shape. In the illustrated example, thepermanent magnets are short in the axial direction and disk-shaped.These disk-shaped permanent magnets 26, 26′ are arranged coaxially witha movable member 27 having a cylindrical shape. First and secondpiston-cylinder assemblies 12, 12′ disposed on both sides of the movablemember 27 are also coaxial with the movable member.

As shown in FIGS. 5 and 7, the disk-shaped magnets 26, 26′ aremagnetized such that both sides thereof with respect to respectivevirtual planes 150, 152 including the axis line of the disk-shapedmagnets have opposite magnetic polarities. The virtual planes 150, 152are oppositely inclined at a predetermined angle with respect to avertical plane (as viewed in FIGS. 5 and 6) including the axis line.

In the above-described configuration, if coils 142, 144 are energizedsuch that central magnetic poles 134 a, 136 a of respectiveelectromagnets 130, 132 have opposite magnetic polarities (for example,the central magnetic pole 134 a is magnetized to the N-pole, while thecentral magnetic pole 136 a is magnetized to the S-pole), thedisk-shaped magnet 26 is attracted by the central magnetic poles 134 a,136 a, while the disk-shaped magnet 26′ is repelled by the centralmagnetic poles 134 a, 136 a and attracted by the right-side magneticpoles 134 b, 136 b. The resultant force of electromagnetic forces actingon the disk-shaped magnets 26 and 26′ is a force in the rightwarddirection in FIG. 4, thereby moving a movable part 112 composed of thedisk-shaped magnets, the movable member 27 to which the disk-shapedmagnets are secured, and the first and second pistons 18, 18′ connectedto both sides of the movable member, in the rightward direction in FIG.4.

When the movable part 112 has been moved rightward in FIG. 4 to aposition where the disk-shaped magnet 26′ faces the right-side magneticpoles 134 b, 136 b, an electric current in a direction opposite to thatof the above case is then applied to the coils 142, 144 to generate aforce for moving the movable part 112 in the leftward direction in FIG.4. Then, the central magnetic pole 134 a of the electromagnet 130 on theleft side in FIG. 5 is magnetized to the N-pole, while the centralmagnetic pole 136 a facing the central magnetic pole 134 a is magnetizedto the S-pole, whereby the disk-shaped magnet 26 in FIG. 5 is subject toa torque Ti rotating the disk-shaped magnet 26 in the counterclockwisedirection. Shapedwise, the disk-shaped magnet 26′ in FIG. 6 is subjectto a torque T2 rotating the disk-shaped magnet 26′ in the clockwisedirection. In other words, the torques acting on the respectivecylindrical magnets 26, 26′ are torques rotating the respective magnets26, 26′ in opposite directions. Thus, these torques cancel each other,whereby it is possible to prevent the movable part 112 from rotating inany direction about an axis of the movable direction.

Further, in this embodiment, cores 134, 136 of the respective fixedelectromagnets 130, 132 are each a laminate of identically shaped thinplates, such as silicon steel plates. Adjacent thin plates are displacedfrom each other such that the magnetic pole portion faces thedisk-shaped magnets 26, 26′ with an appropriate clearance therebetween.In this configuration, these thin plates are fixed to a body casing 120by means of fixing screws 156. Therefore, screw holes 154 formed in thethin plates forming the cores 134, 136 are elongated holes, as shown inFIG. 7.

FIGS. 8 to 10 show a third embodiment of an electromagneticreciprocating fluid device 210 according to the present invention. FIG.8 is a cross-sectional view taken along line VIII-VIII of FIG. 10; FIG.9 is a cross-sectional view taken along line IX-IX of FIG. 8; FIG. 10 isa cross-sectional view taken along line X-X of FIG. 8; and FIG. 11 is across-sectional view taken along line XI-XI of FIG. 11. Theconfiguration of this electromagnetic reciprocating fluid device 210 isgenerally the same as that of the above-described first embodiment.Therefore, the same elements as those in the first embodiment aredenoted by the same reference numerals. This electromagneticreciprocating fluid device 210 is characterized in that guide members212 are disposed in a space between a movable member 27 includingpermanent magnets 26, 26′ and a pair of electromagnets 28, 28′. Withthis configuration, it is possible to resist a torque about an axis 60generated when the permanent magnets 26, 26′ are attracted by theelectromagnets 28, 28′, thereby preventing the rotation of the movablemember.

FIGS. 11 and 12 show a fourth embodiment of an electromagneticreciprocating fluid device 310 according to the present invention. FIG.11 is a cross-sectional view taken along line XI-XI of FIG. 12, and FIG.12 is a cross-sectional view taken along line XII-XII of FIG. 11. In thefigures, a movable member 27 has extending portions 312, 314 extendingupwardly and downwardly, respectively, in FIG. 11, and these extendingportions slidably engage with a guide groove 318 formed on a bodyhousing 316 and a guide groove 322 formed on a lid member 320. With thisconfiguration, it is possible to resist a torque about the axis 60generated when the permanent magnets 26, 26′ are attracted by theelectromagnets 28, 28′, thereby preventing the rotation of the movablemember 27.

In this embodiment, there are provided the two extending portions 312,314 extending upwardly and downwardly, respectively, and the two guidegrooves 318, 322 with which the extending portions 312, 314 are slidablyengaged, respectively. Alternatively, only one of the upper and lowerextending portions, and the corresponding guide groove may be provided.

1. An electromagnetic reciprocating fluid device comprising: a movablemember having a permanent magnet and reciprocable along a predeterminedaxis; an electromagnetic drive unit for driving the movable member alongthe predetermined axis by generating an alternating magnetic fieldacting on the permanent magnet; and, a first support unit for supportingone end of the movable member and a second support unit for supportingthe other end; the electromagnetic reciprocating fluid device generatinga fluid flow by reciprocating the movable member; wherein: the firstsupport unit has a first piston secured to one end of the movable memberand a first fixed cylinder encasing the first piston, and the firstpiston is slidable relative to the first cylinder along a longitudinalaxis of the first fixed cylinder which is parallel to or coaxial withthe predetermined axis; and, the second support unit has a second pistonsecured to an other end of the movable member and a second fixedcylinder encasing the second piston, and the second piston is slidablerelative to the second cylinder along a longitudinal axis of the secondfixed cylinder which is parallel to and apart a predetermined distancefrom the longitudinal axis of the first fixed cylinder.
 2. Anelectromagnetic reciprocating fluid device according to claim 1,wherein: the movable member is a plate-shaped member having a firstsurface and a second surface that are parallel to each other and extendalong the predetermined axis; the permanent magnet comprises a pair ofplate-shaped first and second permanent magnets spaced a predetermineddistance from each other in a direction of the predetermined axis andsecured to the plate-shaped member, each permanent magnet having firstand second magnetic pole surfaces facing and parallel to the respectivefirst and second surfaces of the movable member; the first and secondmagnetic pole surfaces of the first permanent magnet being magnetized toa N-pole and a S-pole, respectively, and the first and second magneticpole surfaces of the second permanent magnet being magnetized to aS-pole and a N-pole, respectively; the electromagnetic drive unitincludes a first electromagnet and a second electromagnet disposed onboth sides of the movable member and facing the first surface and thesecond surface of the movable member, respectively; said first andsecond electromagnets each have a central magnetic pole, and first andsecond side magnetic poles disposed on both sides of the centralmagnetic pole in a direction of reciprocation of the movable member andspaced apart from the central magnetic pole; the central magnetic poleand the first and second side magnetic poles of each of said first andsecond electromagnets are alternately magnetized with oppositepolarities so that the central magnetic pole has a polarity opposite tothat of the first and second side magnetic poles and that the centralmagnetic pole and the first and second side magnetic poles of the firstelectromagnet have magnetic polarities opposite to those of the secondelectromagnet, respectively; and, the first permanent magnet ismagnetically attracted and repelled according to the relationshipbetween the first side magnetic poles and the central magnetic poles,while the second permanent magnet is magnetically attracted and repelledaccording to the relationship between the central magnetic poles and thesecond side magnetic poles.
 3. An electromagnetic reciprocating fluiddevice comprising: a movable member having a permanent magnet andreciprocable along a predetermined axis; and, an electromagnetic driveunit for driving the movable member along the predetermined axis bygenerating an alternating magnetic field acting on the permanent magnet;the electromagnetic reciprocating fluid device generating a fluid flowby reciprocating the movable member; wherein: the movable member is aplate-shaped member having a first surface and a second surface that areparallel to each other and extend in a direction of the predeterminedaxis; the permanent magnet comprises a pair of plate-shaped first andsecond permanent magnets spaced a predetermined distance from each otherin a direction of the predetermined axis and secured to the plate-shapedmember, each permanent magnet having first and second magnetic polesurfaces facing and parallel to the first and second surfaces of themovable member, respectively, the first and second magnetic polesurfaces of the first permanent magnet being magnetized to a N-pole anda S-pole, respectively, and the first and second magnetic pole surfacesof the second permanent magnet being magnetized to a S-pole and aN-pole, respectively; the electromagnetic drive unit includes a firstelectromagnet and a second electromagnet disposed on both sides of themovable member and facing the first surface and the second surface,respectively; the first and second electromagnets each have a centralmagnetic pole, and first and second side magnetic poles disposed on bothsides of the central magnetic pole in a direction of reciprocation ofthe movable member and spaced apart from the central magnetic pole; thecentral magnetic pole and the first and second side magnetic poles ofeach of the first and second electromagnets are alternately magnetizedwith opposite polarities so that the central magnetic pole has amagnetic polarity opposite to that of the first and second side magneticpoles and that the central magnetic poles and the first and second sidemagnetic poles of the first electromagnet have magnetic polaritiesopposite to those of the second electromagnet, respectively; the firstpermanent magnet is magnetically attracted and repelled according to therelationship between the first side magnetic poles and the centralmagnetic poles, while the second permanent magnet is magneticallyattracted and repelled according to the relationship between the centralmagnetic poles and the second side magnetic poles; and, a first guidemember having a guide surface slidably engaging with the first surfaceof the movable member is disposed between the first surface of themovable member and the first electromagnet, and a second guide memberhaving a guide surface slidably engaging with the second surface of themovable member is disposed between the second surface of the movablemember and the second electromagnet.
 4. An electromagnetic reciprocatingfluid device comprising: a movable member having a permanent magnet andreciprocable along a predetermined axis; and, an electromagnetic driveunit for driving the movable member along the predetermined axis bygenerating an alternating magnetic field acting on the permanent magnet;the electromagnetic reciprocating fluid device generating a fluid flowby reciprocating the movable member; wherein: the movable member is aplate-shaped member having a first surface and a second surface that areparallel to each other and extend in a direction of the predeterminedaxis; the permanent magnet comprises a pair of plate-shaped first andsecond permanent magnets spaced a predetermined distance from each otherin a direction of the predetermined axial and secured to theplate-shaped member, each permanent magnet having first and secondmagnetic pole surfaces facing and parallel to the first and secondsurfaces, respectively, the first and second magnetic pole surfaces ofthe first permanent magnet being magnetized to a N-pole and a S-pole,respectively, and the first and second magnetic pole surfaces of thesecond permanent magnet being magnetized to a S-pole and a N-pole,respectively; the electromagnetic drive unit includes a firstelectromagnet and a second electromagnet disposed on both sides of themovable member and facing the first surface and the second surface,respectively; each electromagnet has a central magnetic pole, and firstand second side magnetic poles disposed on both sides of the centralmagnetic pole in a direction of reciprocation of the movable member andspaced apart from the central magnetic pole; the central magnetic poleand the first and second side magnetic poles of each of said first andsecond electromagnets are alternately magnetized with oppositepolarities so that the central magnetic pole has a polarity opposite tothat of the first and second side magnetic poles and that the centralmagnetic poles and the first and second side magnetic poles of the firstelectromagnet have magnetic polarities opposite to those of the secondelectromagnet, respectively; the first permanent magnet is magneticallyattracted and repelled according to the relationship between the firstside magnetic poles and the central magnetic poles, while the secondpermanent magnet is magnetically attracted and repelled according to therelationship between the central magnetic poles and the second sidemagnetic poles; and, the electromagnetic reciprocating fluid devicefurther comprises guide members which have guide grooves extendingparallel to the predetermined axis and sandwich the movable member, theguide grooves slidably engaging edges of the movable member adjacent tothe guide members, thereby maintaining the movable member at a givenangle about the predetermined axis.
 5. An electromagnetic reciprocatingfluid device comprising: a movable member having a permanent magnet andreciprocable along a predetermined axis; an electromagnetic drive unitfor driving the movable member in a direction of the predetermined axisby generating an alternating magnetic field acting on the permanentmagnet; and, a support unit for slidably supporting both ends of themovable member; the electromagnetic reciprocating fluid devicegenerating a fluid flow by reciprocating the movable member; wherein,the permanent magnet has a cylindrical shape extending in a direction ofreciprocation of the movable member, and both sides of the permanentmagnet with respect to a plane including a central axis of the permanentmagnet have opposite magnetic polarities.
 6. An electromagneticreciprocating fluid device according to claim 5, wherein: theelectromagnetic drive unit has first and second electromagnets disposedon both sides of the movable member; each of said first and secondelectromagnet has a central magnetic pole, and first and second sidemagnetic poles disposed on both sides of the central magnetic pole in adirection of reciprocation of the movable member and spaced apart fromthe central magnetic pole; the central magnetic pole and the first andsecond side poles of the first electromagnet are opposite to those ofthe second electromagnet, respectively, the central magnetic pole andthe first and second side magnetic poles of each said first and secondelectromagnets being alternately magnetized with opposite polarities sothat the central magnetic pole has a polarity opposite to that of thefirst and second side magnetic poles and that the central magnetic polesand the first and second side magnetic poles of the first electromagnethave magnetic polarities opposite to those of the second electromagnet,respectively; the permanent magnet includes a first permanent magnet anda second permanent magnet spaced a predetermined distance from eachother in the direction of reciprocation of the movable member; the firstpermanent magnet is magnetically attracted and repelled according to therelationship between the first side magnetic poles and the centralmagnetic poles, while the second permanent magnet is magneticallyattracted and repelled according to the relationship between the centralmagnetic poles and the second side magnetic poles; and, both sides ofthe first permanent magnet have opposite magnetic polarities withrespect to a first plane including the axis of the first permanentmagnet and inclined at a predetermined angle with respect to a planevertical to a flux path generated between the first side magnetic polesof the first and second electromagnets, while both sides of the secondpermanent magnet have opposite magnetic polarities with respect to asecond plane including the axis of the second permanent magnet andinclined oppositely to the first plane at a predetermined angle withrespect to a plane vertical to a flux path generated between the secondside magnetic poles of the first and second electromagnets.
 7. Anelectromagnetic reciprocating fluid device according to claim 1, furthercomprising a pair of spring members disposed at both ends of the movablemember and applying biasing forces toward the center of the movablemember in an axial direction thereof.
 8. An electromagneticreciprocating fluid device according to claim 3, further comprising apair of spring members disposed at both ends of the movable member andapplying biasing forces toward the center of the movable member in anaxial direction thereof.
 9. An electromagnetic reciprocating fluiddevice according to claim 4, further comprising a pair of spring membersdisposed at both ends of the movable member and applying biasing forcestoward the center of the movable member in an axial direction thereof.10. An electromagnetic reciprocating fluid device according to claim 5,further comprising a pair of spring members disposed at both ends of themovable member and applying biasing forces toward the center of themovable member in an axial direction thereof.